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Monday, July 20, 2020 | History

2 edition of Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon found in the catalog.

Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon

Union Carbide Corporation

Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon

low cost silicon array project

by Union Carbide Corporation

  • 169 Want to read
  • 20 Currently reading

Published by Dept. of Energy, for sale by the National Technical Information Service in [Washington], Springfield, Va .
Written in English

    Subjects:
  • Silane,
  • Silicon,
  • Semiconductors

  • Edition Notes

    SeriesDOE/JPL ; 954334-8
    ContributionsBreneman, W. C, Farrier, E. G, Morihara, Hiroshi, United States. Dept. of Energy
    The Physical Object
    Paginationv. :
    ID Numbers
    Open LibraryOL14878164M


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Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon by Union Carbide Corporation Download PDF EPUB FB2