Feasibility of low-cost, high-volume production of silane and pyrolysis of silane to semiconductor grade for silicon

low cost silicon array project

by Union Carbide Corporation

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Published 1979 by Dept. of Energy, for sale by the National Technical Information Service in [Washington], Springfield, Va .
Written in English

Subjects:

• Silane,
• Silicon,
• Semiconductors

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Edition Notes

Series	DOE/JPL ; 954334-8
Contributions	Breneman, W. C, Farrier, E. G, Morihara, Hiroshi, United States. Dept. of Energy
The Physical Object
Pagination	v. :
ID Numbers
Open Library	OL14878164M

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